Emission factor from IPCC
Tier 1 Gas-Specific Emission Factors For Process GHG Emissions From Electronics Manufacturing - SF6; MEMS (micro-electromechanical systems)
World · Process emissions · Any year
Value for any year
46,872kgCO₂e/m²
GWP100 · IPCC AR6
One value, for any year
IPCC sets no date window, so there is no year to pick.
Reference year 2019
Derived by open-climate.ai
- Region
- World GLOBAL
- Boundary
- Process emissions
- Data quality
- LowRated by us, not by the source
- Licence
- Open · IPCC terms
Where 46,872 comes from
open-climate.ai adds up the gases IPCC publishes, each weighted by its warming potential.
Reporting this square metre under the GHG Protocol
Scope 1 46,872
Gas that escapes from equipment you run is a direct emission, so it is your Scope 1.
The factor, standardised
Every factor on open-climate.ai answers the same questions in the same words, whatever the publisher. Open any ⓘ for the definition.
Direct emissions › Industrial process emissions · World · per m² · Generic
Process emissions · Fossil only · AR6
- BoundaryProcess emissionsThe direct non-combustion emissions of an industrial, agricultural or waste process itself, per unit of its activity: the gas its chemistry or biology releases (CO2 from calcining carbonates or from a reductant, CH4 from enteric fermentation, a flooded paddy or stored manure, N2O from nitrogen applied to soil or from nitric and adipic acid). Learn more
- Process emissions
- GWP methodWhich IPCC assessment report's warming potentials convert each gas to CO₂e, and over how many years the warming is counted (GWP100: 100 years). Learn more
- IPCC AR6, 100-year horizon
- Not on the record; set from IPCC's method notes
- CO₂e basisWhich carbon the CO₂e counts. Fossil only leaves out biogenic methane, land-use change and biogenic CO₂; excl. biogenic CO₂ counts biogenic methane but not the other two; net total counts every pool, net of removals. The same activity on two bases is two different numbers. Learn more
- Fossil onlyFossilBio CH₄Land useBio CO₂EN 15804 GWP-fossil
- Split by gas
- Life cycle
- Upstream: not coveredProduction: partly coveredDownstream: not coveredEnd of life: not covered
Low quality · Open licence · Any year
What this number covers
What IPCC counts in the figure for one square metre, phase by phase.
Your record
1 m² in your records. The factor is per m².
= 46,872
Outside this boundary
- Power the unit uses
- Fugitive releases
IPCC does not count any of this in the figure for one square metre.
Gases
Basis: Fossil onlyFossil carbon only: biogenic CO₂, methane from biogenic sources and land-use change are left out. Learn moreFossilBio CH₄Land useBio CO₂EN 15804 GWP-fossil
- Sulphur hexafluoride (SF₆)46,872
Each gas is converted to CO₂e with AR6 100-year warming potentials; only fossil carbon counts, so biogenic CO₂, biogenic methane and land-use carbon are left out.
From IPCC's record to a comparable factor
IPCC publishes the inputs; open-climate.ai computed this value from them. Here is each field as printed and what open-climate.ai made of it.
About this factor
From IPCC
Where it applies
MEMS (micro-electromechanical systems)Source and licence
- Value
- Computed by open-climate.ai from the gas values in this record
- Publisher
- Intergovernmental Panel on Climate Change (IPCC)
- Library
- IPCC
- Record
- 234188
- Published
- 30 July 2026
The values and their metadata are served in full and may be reused with credit to the publisher.
Cite this factor
IPCC Emission Factor Database (EFDB), Task Force on National Greenhouse Gas Inventories, Intergovernmental Panel on Climate Change. Normalised by open-climate.ai, https://open-climate.ai/factors/libraries/ipcc/ (CC BY 4.0). https://open-climate.ai/factors/ef-ipcc-tier_1_gasspecific-global-m2-process_direct-f6f14144/?v=efv1-1b3c1a733d944b47108f368eb9f1cd79
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